%0 Journal Article
%T Decreasing dimensions of planar field-effect transistors by using native inhomogeneity of heterostructure
%A E. L. Pankratov
%J Applied Nanoscience
%@ 2190-5517
%D 2013
%I 
%R 10.1007/s13204-012-0171-z
%X In this paper we consider an approach to decrease dimensions of planar field-effect transistors in a semiconductor heterostructure. Some recommendations have been formulated to optimize technological processes in order to maximize the decreasing of the dimensions of the transistor.
%K Planar field-effect transistors
%K Decreasing dimensions of transistors
%K Transistors in heterostructure
%U http://link.springer.com/article/10.1007/s13204-012-0171-z