%0 Journal Article
%T Optical and microstructural properties of ZnO/TiO2 nanolaminates prepared by atomic layer deposition
%A Yu-Zhu Gu
%A Hong-Liang Lu
%A Yang Geng
%A Zhi-Yuan Ye
%A Yuan Zhang
%A Qing-Qing Sun
%A Shi-Jin Ding and David Wei Zhang
%J Nanoscale Research Letters
%D 2013
%I 
%R 10.1186/1556-276X-8-107
%X ZnO/TiO2 nanolaminates were grown on Si (100) and quartz substrates by atomic layer deposition at 200ˇăC using diethylzinc, titanium isopropoxide, and deionized water as precursors. All prepared multilayers are nominally 50 nm thick with a varying number of alternating TiO2 and ZnO layers. Sample thickness and ellipsometric spectra were measured using a spectroscopic ellipsometer, and the parameters determined by computer simulation matched with the experimental results well. The effect of nanolaminate structure on the optical transmittance is investigated using an ultraviolet¨Cvisible-near-infrared spectrometer. The data from X-ray diffraction spectra suggest that layer growth appears to be substrate sensitive and film thickness also has an influence on the crystallization of films. High-resolution transmission electron microscopy images show clear lattice spacing of ZnO in nanolaminates, indicating that ZnO layers are polycrystalline with preferred (002) orientation while TiO2 layers are amorphous.
%K ZnO/TiO2 nanolaminates
%K ALD
%K Transmittance
%K HRTEM
%U http://www.nanoscalereslett.com/content/8/1/107/abstract