%0 Journal Article
%T Conductive AFM for CNT characterization
%A Marius Toader
%A Holger Fiedler
%A Sascha Hermann
%A Stefan E Schulz
%A Thomas Gessner
%A and Michael Hietschold
%J Nanoscale Research Letters
%D 2013
%I 
%R 10.1186/1556-276X-8-24
%X We report on and emphasize the versatility of conductive atomic force microscopy in characterizing vertically aligned carbon nanotubes (CNTs) aimed to be used in via interconnect technology. The study is conducted on multi-walled CNT arrays vertically grown on a copper-based metal line. Voltage-dependent current mapping and current¨Cvoltage characteristics recorded down to single CNT allow for a comprehensive insight into the electric behaviour of the hybrid structure.
%K Multi-walled carbon nanotubes
%K CNT
%K Conductive AFM
%K Atomic force microscopy
%K Interconnect system
%U http://www.nanoscalereslett.com/content/8/1/24/abstract