%0 Journal Article
%T Self-adaptive phosphor coating technology for wafer-level scale chip packaging<br>
%A Zhou Linsong
%A Rao Haibo
%A Wang Wei
%A Wan Xianlong
%A Liao Junyuan
%A Wang Xuemei
%A Zhou Da
%A Lei Qiaolin
%A <br>
%J 半导体学报
%D 2013
%I 
%X A new self-adaptive phosphor coating technology has been successfully developed, which adopted a slurry method combined with a self-exposure process. A phosphor suspension in the water-soluble photoresist was applied and exposed to LED blue light itself and developed to form a conformal phosphor coating with self-adaptability to the angular distribution of intensity of blue light and better-performing spatial color uniformity. The self-adaptive phosphor coating technology had been successfully adopted in the wafer surface to realize a wafer-level scale phosphor conformal coating. The first-stage experiments show satisfying results and give an adequate demonstration of the flexibility of self-adaptive coating technology on application of WLSCP.
%K white light-emitting diodes
%K self-adaptive conformal coating
%K wafer level encapsulation technology
%K multi-chip packaging<br>
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=A2B81C56D90B149CE076920E1CEE013E&yid=FF7AA908D58E97FA&vid=339D79302DF62549&iid=94C357A881DFC066&sid=A6A7D305E1924204&eid=E158A972A605785F&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=10