%0 Journal Article
%T The resonance frequency shift in an SOI nano-waveguide microring resonator<br>SOI纳米光波导微环谐振腔谐振频移的测试分析
%A Zang Junbin
%A Xue Chenyang
%A Wei Liping
%A Liu Chao
%A Cui Danfeng
%A Wang Yonghua
%A Zhang Wendong
%A <br>臧俊斌
%A 薛晨阳
%A 韦丽萍
%A 刘超
%A 崔丹凤
%A 王永华
%A 张文栋
%J 半导体学报
%D 2013
%I 
%X To research the effect of a deposited SiO2 insulating layer on the resonance frequency modulation of an SOI nanowaveguide ring cavity during integration fabrication, a rib waveguide ring resonator was systematically designed and fabricated. SiO2 insulating layers with different thicknesses were deposited for analysis of the frequency shift characteristics. By testing the resonance transmission spectrum power of this structure, it is found that there are blue shifts after SiO2 deposition, and the frequency shift value of a structure with a 500 nm SiO2 insulating layer deposited is 0.8 nm, that is 0.24 THz at the resonance point where wavelength is around 1550 nm. Taking advantage of this conclusion, efficient optical modulation is available by choosing different frequency band resonance wavelengths to narrow the frequency modulation range.
%K silicon-on-insulator
%K microring resonator
%K electro-optic modulator
%K nanophotonic waveguide<br>SOI
%K 微环谐振腔
%K 电光调制器
%K 纳米光波导
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=DFEDDF274BE1BF8084DC0C18049AC9E6&yid=FF7AA908D58E97FA&vid=339D79302DF62549&iid=E158A972A605785F&sid=2019FB9FC9E8FFAF&eid=E158A972A605785F&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=15