%0 Journal Article
%T STUDY ON W GRADED DOPING DLC COMPOSITE FILMS WITH MULTICOMPONENT TRANSITION LAYER<br>
%A YANG Yiyong
%A PENG Zhijian
%A FU Zhiqiang
%A WU Sudong
%A CHEN Xinchun
%A WANG Chengbiao
%A <br>
%J 金属学报
%D 2010
%I 
%X W graded doping diamond-like carbon (DLC) composite films with multicomponent transition layer were deposited onto silicon, high speed steel and/or stainless steel wafers using ion beam assisted mid-frequency unbalanced magnetron sputtering technique, and the influences of W target current on the composition, structure and properties of the DLC films were investigated. With increasing W target current, the contents of W and its carbides in the films increase, but the contents of sp3 structure decrease. Although there might be some metal droplets on the surface of the as-prepared samples, the distribution of each element is basically homogenous over the whole surface, and the roughness of sample keeps quite low value, which is in the range of 7.56-15.8 nm. The nanohardness (H), elastic modulus (E), and their ratio, H/E, increase with increasing W target current. The critical loads in scratch test of the as-prepared samples increase with the increase of W target current and are in the range of 80-100 N, indicating very strong adhesions between the films and substrates. Under ambient circumstance, the friction coefficients of the coated samples increase but the wear rates decrease obviously.
%K composite coating technology
%K diamond-like carbon (DLC) film
%K W doping
%K tribological property<br>
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=AB188D3B70B071C57EB64E395D864ECE&jid=B061E1135F1CBDEE96CD96C109FEAD65&aid=856F181588CD79D8E43CFB72021B0C84&yid=140ECF96957D60B2&vid=D997634CFE9B6321&iid=CA4FD0336C81A37A&sid=96C778EE049EE47D&eid=9971A5E270697F23&journal_id=0412-1961&journal_name=金属学报&referenced_num=0&reference_num=22