%0 Journal Article
%T Numerical studies on flow and thermal fields in MOCVD reactor<br>
%A ShuQuan Zhong
%A XiaoMin Ren
%A YongQing Huang
%A Qi Wang
%A Hui Huang
%A <br>
%J 科学通报(英文版)
%D 2010
%I 
%X A systematic study has been performed to investigate the flow and thermal patterns of vertical rotating Thomas Swan MOCVD reactor at low pressure,using 2-D dynamic modeling.By varying and calculating the several important process parameters of the reactor,the optimized conditions of the uniform distributions of velocity and temperature profiles in steady state have been obtained.Then,time-dependent models with the step response perturbation of the total gas rate can help identify the visual transient behavi...
%K heteroepitaxy
%K MOCVD reactor
%K transport process
%K flow fields and thermal<br>
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=01BA20E8BA813E1908F3698710BBFEFEE816345F465FEBA5&cid=96E6E851B5104576C2DD9FC1FBCB69EF&jid=DD6615BC9D2CFCE0B6F945E8D5314523&aid=95333DC22B61A23AA5EFDF135AEBFF05&yid=140ECF96957D60B2&vid=E514EE58E0E50ECF&iid=B31275AF3241DB2D&sid=A3F93694B058F76C&eid=CDC418F38C4BFD60&journal_id=1001-6538&journal_name=科学通报(英文版)&referenced_num=0&reference_num=21