%0 Journal Article
%T Photoluminescent method for studying the plastic deformation at the boudary of  SiO2¡ªSi
%A Kulinich O. A.
%A Yatsunskiy I. P.
%A Eshtokina T. Yu.
%A Brusenskaya G. I.
%J Tekhnologiya i Konstruirovanie v Elektronnoi Apparature
%D 2012
%I Politehperiodika
%X The possibility of using the photoluminescence method for studying the mechanisms of plastic deformation at the boundary of "SiO2¡ªSi" in the process of obtaining nanostructured silicon layers by deformation.
%K photoluminescence
%K flowage
%K defects
%K dislocations
%K tensions
%U http://www.tkea.com.ua/tkea/2012/2_2012/pdf/10.zip