%0 Journal Article
%T Artificial intelligence system for technical diagnostics of photomasks
%A Kozina Yu. Yu.
%A Kozin A. A.
%J Tekhnologiya i Konstruirovanie v Elektronnoi Apparature
%D 2012
%I Politehperiodika
%X The developed artificial intelligence system has a high level of noise immunity, so its inclusion in the hardware and software for technical diagnostics of photomasks will reduce the hardware requirements for its execution, and thereby reduce the cost of the complex. As a result it will allow to make a small-scale production profitable.
%K photomask
%K artificial intelligence system
%K technical diagnostics
%K fiducial marks
%U http://www.tkea.com.ua/tkea/2012/1_2012/pdf/02.zip