%0 Journal Article
%T Properties of AZO/Ag/AZO Multilayer Thin Film Deposited on Polyethersulfone Substrate
%A Kyung Hwan Kim
%A Yu Sup Jung
%A Yong Seo Park
%A Won-Jae Lee
%J Transactions on Electrical and Electronic Materials
%D 2013
%I Korean Institute of Electrical and Electronic Material Engineers (KIEEME)
%X The AZO/Ag/AZO multilayer films were deposited on polyethersulfone (PES) substrate by using facing targetsputtering methods at room temperature. The AZO/Ag/AZO multilayer films with polymer substrate had advantages,such as low sheet resistance, high optical transmittance in visible range and stable mechanical properties. Fromthe results, the AZO/Ag/AZO multilayer films (50/12/50 nm) demonstrated a sheet resistance of 11 ¦¸/¡õ and averagetransmittance of 87% in visible range (wavelength of 380-770 nm). Moreover, the multilayer showed stable mechanicalproperties compared to the single-layered AZO sample during the bending test due to the existence of the ductile Agmetal layer.
%K AZO/Ag/AZO
%K Multilayer
%K Polyethersulfone
%K Facing target sputtering
%U http://dx.doi.org/10.4313/TEEM.2013.14.1.9