%0 Journal Article
%T Tunable Sensor Response by Voltage-Control in Biomimetic Hair Flow Sensors
%A Harmen Droogendijk
%A Christiaan M. Bruinink
%A Remco G.P. Sanders
%A Gijs J.M. Krijnen
%J Micromachines
%D 2013
%I MDPI AG
%R 10.3390/mi4010116
%X We presented an overview of improvements in detection limit and responsivity of our biomimetic hair flow sensors by electrostatic spring-softening (ESS). Applying a DC-bias voltage to our capacitive flow sensors improves the responsively by up to 80% for flow signals at frequencies below the sensor¡¯s resonance. Application of frequency matched AC-bias voltages allows for tunable filtering and selective gain up to 20 dB. Furthermore, the quality and fidelity of low frequency flow measurements can be improved using a non frequency-matched AC-bias voltage, resulting in a flow detection limit down to 5 mm/s at low (30 Hz) frequencies. The merits and applicability of the three methods are discussed.
%K flow sensor
%K electrostatic spring softening
%K hair
%K cricket
%K biomimetics
%U http://www.mdpi.com/2072-666X/4/1/116