%0 Journal Article
%T Fabrication of ultrahigh-density nanowires by electrochemical nanolithography
%A Chen Feng
%A Jiang Hongquan
%A Kiefer Arnold
%A Clausen Anna
%J Nanoscale Research Letters
%D 2011
%I Springer
%X An approach has been developed to produce silver nanoparticles (AgNPs) rapidly on semiconductor wafers using electrochemical deposition. The closely packed AgNPs have a density of up to 1.4 กม 1011 cm-2 with good size uniformity. AgNPs retain their shape and position on the substrate when used as nanomasks for producing ultrahigh-density vertical nanowire arrays with controllable size, making it a one-step nanolithography technique. We demonstrate this method on Si/SiGe multilayer superlattices using electrochemical nanopatterning and plasma etching to obtain high-density Si/SiGe multilayer superlattice nanowires.
%U http://www.nanoscalereslett.com/content/6/1/444