%0 Journal Article
%T hp-finite element method for simulating light scattering from complex 3D structures
%A S. Burger
%A L. Zschiedrich
%A J. Pomplun
%A S. Herrmann
%A F. Schmidt
%J Physics
%D 2015
%I arXiv
%R 10.1117/12.2085795
%X Methods for solving Maxwell's equations are integral part of optical metrology and computational lithography setups. Applications require accurate geometrical resolution, high numerical accuracy and/or low computation times. We present a finite-element based electromagnetic field solver relying on unstructured 3D meshes and adaptive hp-refinement. We apply the method for simulating light scattering off arrays of high aspect-ratio nano-posts and FinFETs.
%U http://arxiv.org/abs/1503.06617v1