%0 Journal Article %T Atomic Layer Deposition of Buffer Layers for the Growth of Vertically Aligned Carbon Nanotube Arrays %A Bo Shan %A Guang-Jie Yuan %A Hao-Hao Li %A Hong-Liang Lu %A Hong-Ping Ma %A Johan Liu %A Xiao-Xin Zhang %A Ying-Zhong Tian %J Archive of "Nanoscale Research Letters". %D 2019 %R 10.1186/s11671-019-2947-5 %X Schematic diagram of the VACNTs/graphene composite fil %K Atomic layer deposition %K Vertically aligned carbon nanotube arrays %K Oxide buffer layers %K Thermal interface materials %U https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6445904/