%0 Journal Article
%T Fabrication of polydimethylsiloxane nanofluidic chips under AFM tip-based nanomilling process
%A Jiqiang Wang
%A Yang Gan
%A Yanquan Geng
%A Yongda Yan
%A Zhuo Fang
%J Archive of "Nanoscale Research Letters".
%D 2019
%R 10.1186/s11671-019-2962-6
%X The online version of this article (10.1186/s11671-019-2962-6) contains supplementary material, which is available to authorized users
%K Atomic force microscopy
%K Nanomilling
%K Nanochannels
%K Nanofluidic chip
%U https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6470239/