%0 Journal Article
%T Enhanced Reliability of a-IGZO TFTs with a Reduced Feature Size and a Clean Etch-Stopper Layer Structure
%A Fang Wu
%A Jae-Moon Chung
%A Ji-Hoon Kim
%A Seung-Woo Jeong
%A Yong Xiang
%J Archive of "Nanoscale Research Letters".
%D 2019
%R 10.1186/s11671-019-3001-3
%X Fabrication process of the a-IGZO GOA TF
%K Gate drive IC on array (GOA)
%K Thin-film transistors (TFTs)
%K a-IGZO
%K Back channel etch
%K Etch stopper layer
%U https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6522603/