%0 Journal Article
%T Optical Performance of Top-Down Fabricated AlGaN Nanorod Arrays with Multi-Quantum Wells Embedded
%A Bin Liu
%A Jiangping Dai
%A Junyong Kang
%A Kai Huang
%A Na Gao
%A Penggang Li
%A Rong Zhang
%A Shiqiang Lu
%A Shucheng Ge
%A Youdou Zheng
%J Archive of "Nanoscale Research Letters".
%D 2019
%R 10.1186/s11671-019-3003-1
%X Schematic of the fabrication of AlGaN NR arrays with MQWs embedded. a Original AlGaN-based deep UV LED wafer. b SiO2 deposition. c Spin-coating process of the SU8 photoresist and the UV curable resist. d Soft UV-curing NIL process. e RIE process of SU8 photoresist. f Ni deposition and lift-off process in acetone. g Transfer Ni patterns to the SiO2 layer by RIE. h Transfer patterns from SiO2 to AlGaN-based LED wafer by IC
%K DUV AlGaN multi-quantum wells
%K Nanorod light-emitting diodes
%K Internal quantum efficiency
%K Light extraction
%U https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6529484/