%0 Journal Article
%T Synthesis of 2D transition metal dichalcogenides by chemical vapor deposition with controlled layer number and morphology
%A Jiawen You
%A Md Delowar Hossain
%A Zhengtang Luo
%J Archive of "Nano Convergence".
%D 2018
%R 10.1186/s40580-018-0158-x
%X 4 types of growth routes for TMDs. a Two-step thermolysis process synthesis from (NH4)2MoS4 precursor on SiO2/Si or sapphire substrates followed by the two-step annealing process on insulating substrates and finally transferred onto another substrate [39], Copyright 2012, American Chemical Society. b Layer by layer deposition of MoS2 from MoO3 by surface sulfurization and transferred to another substrate one by one [45], Copyright 2013, American Chemical Society. c Simple vapor transport method showing MoS2 films were deposited on insulating substrate at high temperature from MoS2 powder precursor under inert atmosphere [47], Copyright 2013, American Chemical Society. d (i) LPCVD system setup for TMDs, (ii) Mo¨CO¨CS ternary phase diagram illustrating the pathways for the CVD growth of MoS2 from MoO3 precursors, and (iii) Possible growth routes of MoS2 by the reaction of MoO3£¿x and S [36]. Copyright 2015, Royal Society of Chemistr
%K Transition metal dichalcogenides (TMDs)
%K 2D materials
%K Growth mechanisms
%K Chemical vapor deposition
%K Morphology
%U https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6160381/