%0 Journal Article %T Impact of Surface Roughness on Ion-Surface Interactions Studied with Energetic Carbon Ions 13C+ on Tungsten Surfaces %J Condensed Matter | An Open Access Journal from MDPI %D 2019 %R https://doi.org/10.3390/condmat4010029 %X The effect of surface roughness on angular distributions of reflected and physically sputtered particles is investigated by ultra-high vacuum (UHV) ion-surface interaction experiments. For this purpose, a smooth ( Ra = 5.9 nm) and a rough ( Ra = 20.5 nm) tungsten (W) surface were bombarded with carbon ions 13C + under incidence angles of 30กใ and 80กใ. Reflected and sputtered particles were collected on foils to measure the resulting angular distribution as a function of surface morphology. For the qualitative and quantitative analysis, secondary ion mass spectrometry (SIMS) and nuclear reaction analysis (NRA) were performed. Simulations of ion-surface interactions were carried out with the SDTrimSP (Static Dynamic Transport of Ions in Matter Sputtering) code. For rough surfaces, a special routine was derived and implemented. Experimental as well as calculated results prove a significant impact of surface roughness on the angular distribution of reflected and sputtered particles. It is demonstrated that the effective sticking of C on W is a function of the angle of incidence and surface morphology. It is found that the predominant ion-surface interaction process changes with fluence. View Full-Tex %U https://www.mdpi.com/2410-3896/4/1/29