%0 Journal Article %T Photocatalytic Degradation of Different VOCs in the Gas-Phase over TiO2 Thin Films Prepared by Ultrasonic Spray Pyrolysis %J Catalysts | An Open Access Journal from MDPI %D 2019 %R https://doi.org/10.3390/catal9110915 %X In this study, we deposited TiO 2 thin films onto borosilicate glass by ultrasonic spray pyrolysis at 350 and 450 ˇăC. The aim of study is to determine the effect of deposition temperature on photocatalytic activity of TiO 2 thin films and to investigate the performance of TiO 2 thin films on photocatalytic degradation of methyl tert-butyl ether (MTBE), acetone, acetaldehyde, and heptane as functions of different operating parameters. TiO 2 thin films deposited at 350 and 450 ˇăC have a thickness value of 190 and 330 nm, respectively. All as-prepared TiO 2 films possess an anatase crystalline structure. According to the X-ray photon spectroscopy (XPS) study, the TiO 2 thin film deposited at 350 ˇăC showed a higher amount of oxygen vacancies and hydroxyl groups on the film surface after UV treatment. The aged-TiO 2 thin film deposited at 350 ˇăC showed a water contact angle (WCA) value of 0ˇă after 10 min UV irradiation, showing superhydrophilic surface behavior. The TiO 2 film deposited at 350 ˇăC exhibited the highest amount of conversion of MTBE (100%). The results also showed that TiO 2 films are capable of photocatalytic degradation of MTBE (100%) and acetaldehyde (approx. 80%) in humid air conditions and high airflow rate. The visible-light-activity of TiO 2 thin films was tested with 5 ppm MTBE and acetone. TiO 2 thin films deposited at 350 ˇăC with a surface area of 600 cm 2 showed 60% of MTBE and 33% of acetone degradation under VIS light. View Full-Tex %U https://www.mdpi.com/2073-4344/9/11/915