%0 Journal Article
%T Highly sensitive integrated flexible tactile sensors with piezoresistive Ge 2 Sb2Te5 thin films
%J -
%D 2018
%R https://doi.org/10.1038/s41528-018-0030-4
%X Flexible tactile sensor has been extensively investigated as a key component for emerging electronics applications such as robotics, wearable devices, computer hardware, and security systems. Tactile sensors based on various one-dimensional materials have been widely explored. However, precise control of the direction and distribution of these nanomaterials remains a great challenge, and it has been difficult to scale down the device. Here, we introduce highly sensitive integrated flexible tactile sensors based on uniform phase-change Ge2Sb2Te5 (GST) thin films that can scale device size down, at least, to micrometer range. Significant piezoresistive effect has been observed in GST-based sensors, showing a giant gauge factor of 338. A proof of concept 5£¿¡Á£¿5 sensor array functioning as a touch panel has been demonstrated. Also, the flexible GST tactile sensor has been utilized for monitoring of radial artery pulse. In addition to the well-known tunable electrical and optical properties, the piezoresistive GST films provide a versatile platform for the integration of sensing, recording, and displaying functions
%U https://www.nature.com/articles/s41528-018-0030-4