%0 Journal Article
%T Ultra compact electrochemical metallization cells offering reproducible atomic scale memristive switching
%J -
%D 2019
%R https://doi.org/10.1038/s42005-019-0125-9
%X Here we show electrochemical metallization cells with compact dimensions, excellent electrical performance, and reproducible characteristics. An advanced technology platform has been developed to obtain Ag/SiO2/Pt devices with ultra-scaled footprints (15£¿¡Á£¿15£¿nm2), inter-electrode distances down to 1£¿nm, and a transition from the OFF to ON resistance state relying on the relocation of only few atoms. This technology permits a well-controlled metallic filament formation in a highly confined field at the apex of an atomic scale tip. As a consequence of this miniaturization process, we achieve set voltages around 100£¿mV, ultra-fast switching times of 7.5£¿ns, and write energies of 18 fJ. Furthermore, we demonstrate very good cell-to-cell uniformity and a resistance extinction ratio as high as 6£¿¡¤£¿105. Combined ab-initio quantum transport simulations and experiments suggest that the manufactured structures exhibit reduced self-heating effects due to their lower dimensions, making them very promising candidates as next-generation (non-)volatile memory components
%U https://www.nature.com/articles/s42005-019-0125-9