%0 Journal Article
%T 外延铁酸铋薄膜的阻变存储性能<br> Resistance Storage Properties on Epitaxial Bis-muth Ferrite Thin Films
%A 李奕瑄
%A 张萌
%A 孙志旺
%A 于笑妍
%A 王沛洋
%A 周斌
%A 王沛洋
%A 魏东蕊
%A 王沛洋
%A 侯志青
%A 宋建民
%A 王云明
%J Hans Journal of Nanotechnology
%P 56-61
%@ 2161-0878
%D 2022
%I Hans Publishing
%R 10.12677/NAT.2022.122008
%X <div style=\"text-align:justify;\">
	<span style=\"font-size:14px;\">采用磁控溅射法，以(001)取向钛酸锶SrTiO</span><sub><span style=\"font-size:14px;\">3</span></sub><span style=\"font-size:14px;\"> (STO)单晶基片为衬底，镧锶钴氧La</span><sub><span style=\"font-size:14px;\">0.5</span></sub><span style=\"font-size:14px;\">Sr</span><sub><span style=\"font-size:14px;\">0.5</span></sub><span style=\"font-size:14px;\">CoO</span><sub><span style=\"font-size:14px;\">3</span></sub><span style=\"font-size:14px;\"> (LSCO)为底电极，铁酸铋BiFeO</span><sub><span style=\"font-size:14px;\">3</span></sub><span style=\"font-size:14px;\"> (BFO)为铁电介质构架了Pt/BiFeO</span><sub><span style=\"font-size:14px;\">3</span></sub><span style=\"font-size:14px;\">/La</span><sub><span style=\"font-size:14px;\">0.5</span></sub><span style=\"font-size:14px;\">Sr</span><sub><span style=\"font-size:14px;\">0.5</span></sub><span style=\"font-size:14px;\">CoO</span><sub><span style=\"font-size:14px;\">3</span></sub><span style=\"font-size:14px;\">/SrTiO</span><sub><span style=\"font-size:14px;\">3</span></sub><span style=\"font-size:14px;\"> (Pt/BFO/LSCO/STO)异质结阻变存储器。X射线衍射证实了BFO (001)的外延结构，摇摆曲线表明随着厚度的增大BFO的结晶质量增大。研究BFO薄膜厚度对Pt/BFO/LSCO异质结阻变效应的影响，结果表明，200 nm BFO薄膜开始出现阻变效应，随着厚度的增大，阻变效应所需要的电压相应增加，高阻/低阻的比值增大。此外，300 nm厚度下，阻变效应随着外加电压增大，Pt/BFO/LSCO异质结阻变效应更加显著，且5 V工作电压下，高阻/低阻的比值达到最大。<br />
Using the
magnetron sputtering method, the (001) oriented strontium titanate SrTiO</span><sub><span style=\"font-size:14px;\">3</span></sub><span style=\"font-size:14px;\"> (STO) single crystal substrate is used as the substrate, the lanthanum
strontium cobalt oxide La</span><sub><span style=\"font-size:14px;\">0.5</span></sub><span style=\"font-size:14px;\">Sr</span><sub><span style=\"font-size:14px;\">0.5</span></sub><span style=\"font-size:14px;\">CoO</span><sub><span style=\"font-size:14px;\">3</span></sub><span style=\"font-size:14px;\"> (LSCO)
is used as the bottom electrode and the bismuth ferrite BiFeO</span><sub><span style=\"font-size:14px;\">3</span></sub><span style=\"font-size:14px;\"> (BFO)
is used as the ferroelectric medium, constructed Pt/BiFeO</span><sub><span style=\"font-size:14px;\">3</span></sub><span style=\"font-size:14px;\">/La</span><sub><span style=\"font-size:14px;\">0.5</span></sub><span style=\"font-size:14px;\">Sr</span><sub><span style=\"font-size:14px;\">0.5</span></sub><span style=\"font-size:14px;\">CoO</span><sub><span style=\"font-size:14px;\">3</span></sub><span style=\"font-size:14px;\">/SrTiO</span><sub><span style=\"font-size:14px;\">3</span></sub><span style=\"font-size:14px;\"> (Pt/BFO/LSCO/STO)
%K 阻变效应，异质结，铁酸铋，磁控溅射<br> Resistance Effect
%K Heterostructure
%K Bismuth Ferrite
%K Magnetron Sputtering
%U http://www.hanspub.org/journal/PaperInformation.aspx?PaperID=51805