Contact Mechanics: Modeling the Interaction Between Surfaces with Nanoscale Asperities for MEMS via Online Simulations in NanoHUB

Physics-based simulations are playing an increasingly important role in materials and device engineering, providing information that can help engineers understand current technology and optimize designs. We describe a model and simulation tool for the characterization of the interaction between surfaces with nanoscale asperities relevant in nano and micro-electromechanical systems (N/MEMS) whose operation involves periodic contacts. A mesoscale contact model was developed to characterize the interaction and adhesion between two surfaces in terms of surface topography and fundamental materials properties. The model computed the long-range van der Waals attractive forces and repulsive interactions originating from the contact between solid surface asperities. The tool has been deployed in nanoHUB.org and is available for fully interactive, free online simulations using a web browser.