Fabrication of Carbon Nanotube Field Effect Transistor

The authors review here the growth of carbon nanotube (CNT) by catalytic growth technique and the methods to grow oriented long CNTs with controlled diameters. The process steps for the fabrication of both back and top-gated carbon nanotube field effect transistor (CNFET) are given. We also discuss the techniques for realizing both p and n type of CNT transistors.