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Effect of Ion Irradiation on the Structural State of the Vacuum-arc Nitride CoatingsKeywords: Surface engineering , Plasma technologies , Ion technologies , Advanced plasma and ion sources , Plasma-surface interaction Abstract: The effect of irradiation with ions Ar+ (energy of 1 MeV and 1.8 MeV) and He+ (energy of 0.6 MeV) on the structure and mechanical properties of the vacuum-arc nitride coatings. It is shown that the level of exposure to radiation materials can be divided into 3 classes: a) “the most persistent” - significant changes occur only on the substructure level (as an example - multi-element system Ti-Zr-V-Hf-Nb-Ta-N), b) “the medium resistance “- significant changes occur in the macro stress-strained state (as an example - the system Ti-N), c) “structural variable” - significant changes in the macro-level and phase composition (as an example, the system Mo-N).
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