The Effect of Gas Phase Composition on the Structural Characteristics and Resistivity of Nitrogen-doped Nanostructured Diamond Coatings

The experimental results of the effect of the gas phase composition on nitrogen-doped nanostructured diamond coatings synthesized in the glow discharge plasma on their structure and resistance have been presented. It was shown that changes in the electrical conductivity of the nitrogen doped nanostructured diamond coatings are primarily related to changes in the electrical conductivity of the grain boundaries and did not to changes in the grain size of the diamond phase.