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Micromachines  2013 

Tunable Sensor Response by Voltage-Control in Biomimetic Hair Flow Sensors

DOI: 10.3390/mi4010116

Keywords: flow sensor, electrostatic spring softening, hair, cricket, biomimetics

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Abstract:

We presented an overview of improvements in detection limit and responsivity of our biomimetic hair flow sensors by electrostatic spring-softening (ESS). Applying a DC-bias voltage to our capacitive flow sensors improves the responsively by up to 80% for flow signals at frequencies below the sensor’s resonance. Application of frequency matched AC-bias voltages allows for tunable filtering and selective gain up to 20 dB. Furthermore, the quality and fidelity of low frequency flow measurements can be improved using a non frequency-matched AC-bias voltage, resulting in a flow detection limit down to 5 mm/s at low (30 Hz) frequencies. The merits and applicability of the three methods are discussed.

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