Modelling a Compliant-Based Precise Positioning Stage

The paper presents modelling precise dual axis flexure-based precision positioning systems for micro-positioning applications. The positioning system is featured with monolithic architecture, flexure-based joints and piezo stacks. Its workspace has been evaluated via analytical approaches. Amplification mechanism is optimally designed. The mathematical model of the positioning system has been derived and verified by resorting to finite element analysis (FEA). The established analytical and (FEA) models are helpful for optimizing reliable architecture and improving the performance of the positioning system.