EFFECT OF SOL CONCENTRATION AND SUBSTRATE TYPE ON MICROSTRUCTURE FORMATION OF PZT THIN FILMS

Pb(Zr0.52Ti0.48)O3 (PZT) sols were prepared by a modified sol-gel route using both solvents - acetic acid and stabilizer solution (n-propanol : 1,2-propanediol in the rate 10 : 1). The sols were deposited by spin-coating onto platinized Al2O3 or SiO2/Si substrates. Results of SEM and XRD analyses confirmed, that the transformation of the amorphous PZT film to perovskite structure happened after sintering at 650°C. The mechanism of microstructure formation has described for morphologicaly different perovskite particle types in 1, 2 and 3-layered PZT thin films with thickness of 200-500 nm on used substrates. Three different PZT film microstructure types in dependence on the applied sol concentration were found. It was found, that the PZT/Pt/Al2O3 film microstructure at 1.0 M sol concentration was composed of two forms of perovskite particles, big rosette and irregular cuboidal particles. Small spherical particles and rosette structure were found in PZT/Pt/Si/SiO2 films.