Quantitative characterization of the mechanical properties of materials
in micro-/nano-scale using depth-sensing indentation technique demands high performance
of nanoindentation instruments in use. In this paper, the efforts to calibrate
the capacitive force transducer of a commercial nanoindentation instrument are presented,
where the quasi-static characteristic of the force transducer has been calibrated
by a precise compensation balance with a resolution of ~1 nN. To investigate the
dynamic response of the transducer, an electrostatic MEMS (Micro-Electro-Mechanical
System) based on nano-force transfer standard with nano-Newton (10-9 Newton)
resolution and a bandwidth up to 6 kHz have been employed. Preliminary
experimental results indicate that1) the force transducer under calibration has a
probing force uncertainty less than 300 nN (1σ) in the calibration range of 1 mN; 2) the transient duration
at contact points amounts to 10 seconds; 3) the overshoot of
engagement is pre-load dependent.
References
[1]
C. M. F. Doerner and W. D. Nix, “A Method for Interpreting the Data from Depth Sensing Indentation Instruments,” Journal of Materials Research, Vol. 1, No. 4, 1986, pp. 601-609.
[2]
W. C. Oliver and G. M. Pharr, “An Improved Technique for Determining Hardness and Elastic Modulus Using Load and Displacement Sensing Indentation Experiment,” Journal of Materials Research, Vol. 7, No. 6, 1992, pp. 1564-1583.
[3]
G. M. Pharr and A Bolshakov, “Understanding nanoindentation Unloading Curves,” Journal of Materials Research, Vol. 17, No. 10, 2002, pp. 2660-2671.
[4]
ISO 14577-1, “Metallic Materials—Instrumented Indentation Test for Hardness and Materials Parameters—Part 1: Test Method,” International Organization for Standardization, Geneva, 2002.
[5]
ISO 14577-2, “Metallic Materials—Instrumented Indentation Test for Hardness and Materials Parameters—Part 2: Verification and Calibration of Testing Machines,” International Organization for Standardization, Geneva, 2002.
[6]
K. Herrman, N. M. Jennett, W. Wegener, J. Meneve and R. Seeman, “Progress in Determining the Area Function of Indenters Used for Nanoindentation,” Thin Solid Films, Vol. 377-378, 2000, pp. 394-400.
[7]
Z. Li, K. Herrmann and F. Pohlenz, “A Comparative Approach for Calibration of the Depth Measuring System in a Nanoindentation Instrument,” Measurement, Vol. 39, No. 6, 2006, pp. 547-552.
[8]
A. Yacoot and M. J. Downs, “The Use of x-Ray Interferometry to Investigate the Linearity of the NPL Differential Plane Mirror Optical Interferometer,” Measurement Science and Technology, Vol. 11, No. 8, 2000, pp. 1126- 1130.
[9]
J. R. Pratt, J. A. Kramar, D. B. Newell and D. T. Smith, “Review of SI Traceable Force Metrology for Instrumented Indentation and Atomic Force Microscopy,” Measurement Science and Technology, Vol. 16, No. 11, 2005, pp. 2129-2137.
[10]
Y. Huan, D. X. Liu, R. Yang and T. H. Zhang, “Analysis of the Practical Force Accuracy of Electromagnet-Based Nanoindenters,” Measurement, Vol. 43, No. 9, 2010, pp. 1090-1093.
[11]
B. Bhushan and A. Kulkarni, “Nanoindentation and Picoindentation Measurements Using a Capacitive Transducer System in Atomic Force Microscopy,” Philosophical Magazine A, Vol. 74, No. 5, 1996, pp. 1117-1128.
S. Gao, Z. K. Zhang, Y. Wu and K. Herrman, “Development of a Multifunctional Microelectromechanical NanoForce Actuator for Calibration of the Spring Constant of an AFM Cantilever,” Proceedings of the 9th Euspen International Conference, San Sebastian, 2-5 July 2009, pp. 267-270.
[14]
W. C. Tang, T.-C. H. Nguyen, M. W. Judy and R. T. Howe, “Electrostatic-Comb Drive of Lateral Polysilicon Resonators,” Sensors and Actuators A, Vol. 21, No. 1-3, 1990, pp. 328-331.
[15]
K. Hiller, M. Kuechler, D. Billep, B. Schroeter, M. Dienel, D. Scheibner and T. Gessner, “Bonding and Deep RIE: A Powerful Combination for High-Aspect-Ratio Sensors and Actuators,” Proceedings of SPIE 5715, Micromachining and Microfabrication Process Technology X, San Jose, 11 April 2005.
[16]
S. Gao, Z. K. Zhang, Y. Wu and K. Herrmann, “Towards Quantitative Determination of the Spring Constant of a Scanning Force Microscope Cantilever with a Microelectromechanical Nano-Force Actuator,” Measurement Science and Technology, Vol. 21, No. 1. 2010, Article ID: 015103.