Carbon diamond-like thin films on a silicon substrate were deposited by direct reactive ion beam method with an ion source based on Penning direct-current discharge system with cold hollow cathode. Deposition was performed under various conditions. The pressure (12–200？mPa) and the plasma-forming gas composition consisting of different organic compounds and hydrogen (C3H8, CH4, Si(CH3)2Cl2, H2), the voltage of accelerating gap in the range 0.5–5？kV, and the substrate temperature in the range 20–850°C were varied. Synthesized films were researched using nanoindentation, Raman, and FTIR spectroscopy methods. Analysis of the experimental results was made in accordance with a developed model describing processes of growth of the amorphous and crystalline carbon materials. 1. Introduction Film deposition or surface modification directly from the ion beam is one of the most promising methods because it allows controlling the energy of the particles of deposited material and has a number of advantages over the other most common methods of producing films in vacuum [1–4]. At an average energy of the ions, 1–5？keV, the deposition method of immersion ion implantation is implemented [5–7]. For obtaining ions with such energy it is convenient to use self-contained ion source based on DC glow discharge plasma allowing to regulate the ion energy and ion current density precisely and widely. Research to improve technology and equipment to carry out this process are very relevant in view of the accelerated development of micro- and nanoelectronics today. Deposition of diamond-like carbon films [8] by the above-mentioned methods using multicellular ion source (IS) “Radical-M250” [3] is known. This IS forms the ion beam with a large area of cross section. To solve the same technological challenges, we proposed [9] to use the IS based on Penning discharge with hollow cathode in crossed E × H fields. Used modification of this type of IS cannot produce ion beams of large cross-sectional area; however, it has a number of advantages over other parameters. Unlike IS “Radical-M250” in the proposed IS there is independent adjustment of the ion current density and ion energy in a wide range. Furthermore, FWHM of function of ion energy distribution in the beam of IS “Radical-M250” is 540–580？eV [3]; the same parameter at the same beam current in proposed IS can be sufficiently lower [10]. Providing a significant influence of the ion energy on properties of the synthesized films, the ion source with a narrow energy spectrum of the ions will more effectively and predictably control
References
[1]
A. V. Hayes, V. Kanarov, and B. Vidinsky, “Fifty centimeter ion beam source,” Review of Scientific Instruments, vol. 67, no. 4, pp. 1638–1641, 1996.
[2]
M. J. Paterson, K. G. Orrman-Rossiter, D. K. Sood, and S. K. Bhargava, “Structural investigation of low energy ion beam deposited diamond-like films,” Diamond and Related Materials, vol. 2, no. 11, pp. 1439–1444, 1993.
[3]
K. A. Valiev, “Reactive ion beam synthesis of thin films directly from ion beam,” Physical Surface Engineering, vol. 1, no. 1, pp. 27–33, 2003.
[4]
P. J. Fallon, V. S. Veerasamy, C. A. Davis et al., “Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energy,” Physical Review B, vol. 48, no. 7, pp. 4777–4782, 1993.
[5]
A. André, “Physics of plasma-based ion implantation and deposition (PBIID) and high power impulse magnetron sputtering (HIPIMS): a comparison,” Physica Status Solidi A, vol. 205, no. 4, pp. 965–970, 2008.
[6]
A. Anders, Ed., Handbook of Plasma ImmersIon Ion ImplantatIon and DepositIon, John Wiley & Sons, New York, NY, USA, 2000.
[7]
K. Baba and R. Hatada, “Properties of diamond-like carbon films deposited on polymer substrates by plasma source ion implantation,” in Proceedings of the 8th International Conference on Modification of Materials with Particle Beams and Plasma Flows (CMM '06), Tomsk, Russia, September 2006.
[8]
J. Robertson, “DLC review,” Materials Science and Engineering, vol. 37, article 135, 2002.
[9]
V. Y. Martens, B. M. Sinelnikov, V. A. Tarala, and E. F. Shevchenko, “Ion source based on reflex-discharge with cold hollow cathode for reactive ion-beam synthesis of diamond-like films,” in Proceedings of the 9th International Conference on Modification of Materials with Particle Beams and Plasma Flows (CMM '08), Tomsk, Russia, September 2008.
[10]
N. V. Gavrilov, “Research of energy spectra of ions extracted from reflex discharge with hollow cathode,” Izvestia Vuzov. Phisika, vol. 23, no. 3, pp. 124–126, 1980 (Russian).
[11]
R. Locher, C. Wild, and P. Koidl, “Direct ion-beam deposition of amorphous hydrogenated carbon films,” Surface and Coatings Technology, vol. 47, no. 1–3, pp. 426–432, 1991.
[12]
V. Y. Martens and E. F. Shevchenko, “Analysis of a hollow-cathode reflex discharge in a hydrocarbon flow,” Technical Physics, vol. 55, no. 8, pp. 1134–1137, 2010.
[13]
V. I. Farenik, “Receipt and transportation of ion beams of low and average energy,” Physical Surface Engineering, vol. 3, no. 1-2, pp. 4–29, 2005.
[14]
A. C. Ferrari and J. Robertson, “Interpretation of Raman spectra of disordered and amorphous carbon,” Physical Review B, vol. 61, no. 20, pp. 14095–14107, 2000.
[15]
C. Casiraghi, A. C. Ferrari, and J. Robertson, “Raman spectroscopy of hydrogenated amorphous carbons,” Physical Review B, vol. 72, no. 8, Article ID 085401, 2005.
[16]
A. C. Ferrari and J. Robertson, “Raman spectroscopy of amorphous, nanostructured, diamond-like carbon, and nanodiamond,” Philosophical Transactions of the Royal Society A, vol. 362, no. 1824, pp. 2477–2512, 2004.
[17]
M. H. Brodsky, M. Cardona, and J. J. Cuomo, “Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputtering,” Physical Review B, vol. 16, no. 8, pp. 3556–3571, 1977.
[18]
D. Sarangi, O. S. Panwar, S. Kumar, and R. Bhattacharyya, “Characterization studies of diamond-like carbon films grown using a saddle-field fast-atom-beam source,” Journal of Vacuum Science and Technology A, vol. 18, no. 5, pp. 2302–2311, 2000.
[19]
C. Casiraghi, F. Piazza, A. C. Ferrari, D. Grambole, and J. Robertson, “Bonding in hydrogenated diamond-like carbon by Raman spectroscopy,” Diamond and Related Materials, vol. 14, no. 3–7, pp. 1098–1102, 2005.
[20]
B. M. Sinel'nikov and V. A. Tarala, “Modeling and simulating the nucleation of amorphous or crystalline films of diamond-like materials,” Russian Microelectronics, vol. 40, no. 8, pp. 578–586, 2011.
[21]
B. M. Sinelnikov, V. A. Tarala, and T. N. Prohoda, “Synthesis and study of diamond-like carbon films produced by RF plasma from methane,” Vestnik YuNC RAN, vol. 5, no. 2, pp. 120–123, 2009 (Russian).
[22]
N. V. Gavrilov, A. S. Mamaev, and A. S. Kaigorodov, “Diamond-like a-C:H coatings deposited in a non-self-sustained discharge with plasma cathode,” Technical Physics Letters, vol. 35, no. 1, pp. 33–35, 2009.
