hp-finite element method for simulating light scattering from complex 3D structures

Methods for solving Maxwell's equations are integral part of optical metrology and computational lithography setups. Applications require accurate geometrical resolution, high numerical accuracy and/or low computation times. We present a finite-element based electromagnetic field solver relying on unstructured 3D meshes and adaptive hp-refinement. We apply the method for simulating light scattering off arrays of high aspect-ratio nano-posts and FinFETs.