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- 2019
Fabrication of polydimethylsiloxane nanofluidic chips under AFM tip-based nanomilling processDOI: 10.1186/s11671-019-2962-6 Keywords: Atomic force microscopy, Nanomilling, Nanochannels, Nanofluidic chip Abstract: The online version of this article (10.1186/s11671-019-2962-6) contains supplementary material, which is available to authorized users
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