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- 2019
Enhanced Reliability of a-IGZO TFTs with a Reduced Feature Size and a Clean Etch-Stopper Layer StructureDOI: 10.1186/s11671-019-3001-3 Keywords: Gate drive IC on array (GOA), Thin-film transistors (TFTs), a-IGZO, Back channel etch, Etch stopper layer Abstract: Fabrication process of the a-IGZO GOA TF
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