Optical Performance of Top-Down Fabricated AlGaN Nanorod Arrays with Multi-Quantum Wells Embedded

Schematic of the fabrication of AlGaN NR arrays with MQWs embedded. a Original AlGaN-based deep UV LED wafer. b SiO2 deposition. c Spin-coating process of the SU8 photoresist and the UV curable resist. d Soft UV-curing NIL process. e RIE process of SU8 photoresist. f Ni deposition and lift-off process in acetone. g Transfer Ni patterns to the SiO2 layer by RIE. h Transfer patterns from SiO2 to AlGaN-based LED wafer by IC