Review on Analytical Design, Simulation, Fabrication, Characterization, and Packaging Aspects of Micro Electro Mechanical Switches for Radio Frequency Applications

This paper mainly reviews the Analytical Design, Simulation, Fabrication, Characterization, and Packaging aspects of Micro Electro Mechanical Switches for Radio Frequency Applications. The switching is mainly required in many applications i.e., in low frequency and high frequency applications. GaAs based PIN Diode and CMOS based FET are suitable for switching in low frequency applications, but for good isolation and insertion based switching in radio frequency these switches are not suitable. Radio Frequency Micro Electro Mechanical Switches are giving solution for this problem. In this paper, all verities of Radio Frequency MEMS switch merits and demerits are discussed. In addition to review, a cantilever based RF MEMS Switch is designed and simulated using Finite Element Method (FEM) tool. And a review based surface and bulk micromachining based fabrication processes discussed by correlating with the design and simulation aspects. Finally discussed about the challenges in the realization. Keywords: Mems; Radio frequency; Switching; Cantilever; Beam; Electrostatic force; Material scienc