The simulation by the Monte Carlo method executed by the software PyPENELOPE proved effective to specify the particle propagation characteristics by calculating the absorption fractions, backscattering and transmission of electrons and secondary photons under the incidence of 0.5 to 20 KeV range of primary electrons. More than 99.9% of the primary electrons were transmitted in the 125 nm thick MgO/TiO2 material at 20 KeV. This occurred because several interactions took place in the transmitted primary irradiation such as characteristic, fluorescence, and bremsstrahlung produced when of the occupation of the KL3, KL2, KM3, and KM2 shell and sub-shell of titanium and magnesium which are the elements with a high atomic number in the material. The transmission particle characteristic of this material is therefore an indicator capable of improving the electrical performance and properties of the sensor.
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