基于振频逆解算的高抗振移相干涉仪系统设计
Design of High Vibration Resistance Phase-Shifting Interferometer System Based on Inverse Vibration Frequency Solution

本文设计并研制了一款具有高抗振性功能的移相式激光面型干涉仪系统。该系统通过快速获取连续非线性移相后获取样件干涉图组，并对其进行振频逆解算分析，自动判断干涉条纹图受振动干扰情况，筛选出受振动干扰相对较小的高质量干涉图组，可得到高抗振的稳定测量结果，从而实现激光移相干涉仪系统的抗振能力增强，极大改善干涉仪测量准确度与效率。
A phase shifting laser surface interferometer with high vibration resistance is designed and developed in this paper. After the rapid continuous nonlinear phase shifting of the phase-shifting laser interferometer, the sampling interferogram group is obtained, and the vibration frequency inverse solution analysis is carried out on it. The interference of the interference fringe pattern is automatically judged, and the high-quality interferogram group with relatively small vibration interference is screened out, and the stable measurement results with high vibration resistance can be obtained, so as to enhance the anti-vibration ability of the laser phase-shifting interferometer system and greatly improve interferometer measurement accuracy and efficiency.