3D Energy Harvester Evaluation

This paper discusses the characterization and evaluation of an MEMS based electrostatic generator, a part of the power supply unit of the self-powered microsystem[1,2,3]. The designed generator is based on electrostatic converter and uses the principle of conversion of non-electric energy into electrical energy by periodical modification of gap between electrodes of a capacitor [4]. The structure is designed and modeled as three-dimensional silicon based MEMS. Innovative approach involving the achievement of very low resonant frequency of the structure (about 100Hz) by usage of modified long cantilever spring design, minimum area of the chip, 3D work mode, the ability to be tuned to reach desired parameters, proves promising directions of possible further development.