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Plasmonics based VLSI processesKeywords: Waveguide Ring Resonator , photolithography , plasmons , sub - wavelength Abstract: In continuum to my previous paper titled‘Implementation of plasmonics in VLSI’, this paperattempts to explore further, the actual physicalrealization of an all-plasmonic chip. In this paper,various methods of plasmon-basedphotolithography have been discussed and anobservation is made w.r.t the cost effectiveness andease of adaptability. Also, plasmonics based activeelement has been discussed which would helpunravel further arenas ofapproaches and methodstowards the realization of an all-plasmonic chip.
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