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Research on Vibration Isolation Systems Used in Laser and Nanotechnologies

Keywords: vibroisolation systems , negative stiffness , low frequency , transmissibility

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Abstract:

The paper discusses the efficiency of a vibration isolation system made of the optical table and two negative-stiffness tables and considers excitation referring to harmonic and nonharmonic methods in the frequency range of 0,2–110 Hz. The article reviews the types and sources of vibrations and types of vibration isolation systems, including those of negative-stiffness. The paper also presents the methodology of experimental tests and proposes research on vibration transmissibility. A composite system consisting of two vibration isolation table having negative stiffness and an air table has been tested. The results and conclusions of experimental analysis are suggested at the end of the article.Article in Lithuanian

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