Investigation of nanoporous material under quasi-equilibrium conditions

Based on the three parametric Lorenz system, a model was developed that permits to describe the behavior of the plasma-condensate system near phase equilibrium in a self-consistent way. Considering the effect of fluctuations of the growth surface temperature, the evolution equation and the corresponding Fokker-Planck equation were obtained. The phase diagram is built which determines the system parameters corresponding to the regime of the porous structure formation.