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电子学报  2015 

超浅结亚45nmMOSFET亚阈值区二维电势模型

DOI: 10.3969/j.issn.0372-2112.2015.01.015, PP. 94-98

Keywords: 超浅结亚45nmMOSFET,二维电势半解析模型,亚阈值电流

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Abstract:

文章提出将亚阈值区超浅结MOSFET的氧化层和Si衬底划分为三个区域,得到三个区域的定解问题,并用特征函数展开法求出了因边界衔接条件而产生的未知系数,首次得到超浅结亚45nmMOSFET的二维电势半解析模型,并给出了亚阈值电流模型.通过与Medici模拟结果对比发现该模型能够准确模拟亚阈值下的超浅结15~45nmMOSFET的二维电势和电流.

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